Method for preparing hexagonal boron nitride film through chemical vapor deposition under normal pressure

According to the method for preparing the hexagonal boron nitride thin film through chemical vapor deposition under the normal pressure, the surface of the copper foil obtained after ultrasonic cleaning, electrochemical polishing, chemical corrosion and high-temperature annealing is smooth and low i...

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Hauptverfasser: GAO GUANGCUN, WANG JIEQIONG
Format: Patent
Sprache:chi ; eng
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