Mass spectrometer based on laminated structure
The invention relates to a mass spectrometer based on a laminated structure. The mass spectrometer comprises a sampling device, an ionization device, a mass analyzer, a detector and a vacuum cavity. The vacuum cavity is formed by stacking two layers of substrates. At least one electrode of the sampl...
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| creator | LIU YOUJIANG CHENG YUPENG LI SHAN CHEN CHILAI OH JANG WOOK WANG HAN |
| description | The invention relates to a mass spectrometer based on a laminated structure. The mass spectrometer comprises a sampling device, an ionization device, a mass analyzer, a detector and a vacuum cavity. The vacuum cavity is formed by stacking two layers of substrates. At least one electrode of the sample introduction device or the ionization device or the mass analyzer or the detector is manufactured on the substrate. According to the invention, the problems of heterogeneity, isomerism and low integration level of the ion optical device are solved, the vacuum cavity and the ion optical device are fused, and the problems of complex structure, redundant design, bulkiness and the like of the existing vacuum cavity are solved. The mass spectrometer is simple in structure, redundant design is eliminated, the size and weight of the mass spectrometer are greatly reduced, miniaturization of the mass spectrometer is facilitated, mass parallel manufacturing is facilitated, and the manufacturing cost is greatly reduced.
本发明 |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY |
| title | Mass spectrometer based on laminated structure |
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