Semiconductor structure and preparation method thereof, and preparation method of semiconductor device

The invention relates to a semiconductor structure and a preparation method thereof, and a preparation method of a semiconductor device. According to the semiconductor structure, an epitaxial transmission layer comprises device regions and test regions which are alternately arranged; the to-be-teste...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG ZHENGQIN, CHEN KE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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