METHOD AND APPARATUS FOR MANUFACTURING EDGE STRUCTURE OF SEMICONDUCTOR DEVICE

The invention relates to a method for producing an edge structure of a semiconductor component, comprising the following steps: providing a semiconductor body (1) which has at least two main surfaces (3, 4) which are spaced apart from one another and each have an edge (5, 6) between which an edge su...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KELLNER-WERDHAUSEN ULRICH, GAMMON THOMAS, BARTHELMESS REINER, SOMMER STEFAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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