Processing device

The invention provides a processing apparatus which cleans a wider range of a processing chamber cover than fluid ejection from a nozzle. The processing apparatus includes: a chuck table that holds an object to be processed; a machining unit having a main shaft and machining the workpiece attracted...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	HOSHIKAWA HIROTOSHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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