Nanometer displacement real-time measurement system and method based on laser polarization interference

The invention discloses a nanometer displacement real-time measurement system based on laser polarization interference. Comprising an infrared laser, a first polaroid, an iris diaphragm, a first polarization splitting prism, a first 1/4 wave plate, a movable plane mirror, a second 1/4 wave plate, a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CAO ZHENZHOU, QIU XUEJUN, TIAN XINYE, WANG HAN, GUO YI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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