Manufacturing method, device and equipment of chromium-platinum alloy target material and storage medium of chromium-platinum alloy target material

The invention discloses a manufacturing method, device and equipment of a chromium-platinum alloy target material and a storage medium thereof. Platinum powder and chromium powder meeting preset requirements are obtained, and the real density, particle size distribution and particle specific surface...

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Bibliographische Detailangaben
Hauptverfasser: PAN GUODONG, BAI XIANGYU, ZHENG SHUANGMING, WU YUSHENG, ZHANG RUOYU, XIA YANBIN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a manufacturing method, device and equipment of a chromium-platinum alloy target material and a storage medium thereof. Platinum powder and chromium powder meeting preset requirements are obtained, and the real density, particle size distribution and particle specific surface area of the platinum powder and the real density, particle size distribution and particle specific surface area of the chromium powder are obtained; based on the real density, the particle size distribution and the particle specific surface area of the platinum powder and the real density, the particle size distribution and the particle specific surface area of the chromium powder, the platinum powder and the chromium powder are subjected to mass matching, and a first raw material is obtained; mixing and stirring the first raw material to obtain a second raw material; performing vacuum hot-pressing preforming on the second raw material to obtain a first target material; performing indium coating binding on the fir