Wafer defect detecting and positioning algorithm based on cascaded YOLO-GAN

The invention belongs to the field of deep learning computer machine vision and the field of semiconductor technology detection, and provides a wafer defect detection and positioning algorithm based on cascaded YOLO-GAN. In the wafer generating and manufacturing process, an original image wafer is s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG RUI, HUANG YI, XIA XINDONG, YANG BIAO, XIE CHENMINGYUE, YANG CHANGCHUN, TANG ZHIHAN, HUANG ZHENTAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS
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