Glow discharge mass spectrometry detection method for tantalum powder
The invention provides a glow discharge mass spectrometry detection method for tantalum powder, which comprises the following steps of: processing a groove in an indium sample carrying sheet, filling the tantalum powder into the groove, and performing static pressure on the tantalum powder to obtain...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a glow discharge mass spectrometry detection method for tantalum powder, which comprises the following steps of: processing a groove in an indium sample carrying sheet, filling the tantalum powder into the groove, and performing static pressure on the tantalum powder to obtain a tantalum sample; the tantalum sample is sequentially cooled and sputtered in a glow discharge mass spectrum, in a direct current mode, the discharge voltage is 1.1-1.3 KV, the discharge current is 2.8-3.2 mA, the resolution of an instrument is adjusted to be within the range of 3400-4000, the signal intensity of an element to be detected is collected, and the mass fraction of the element to be detected is calculated by applying a relative sensitivity factor; according to the detection method, introduction of impurities is avoided as far as possible in the sample preparation process, so that the detection degree of the to-be-detected sample is relatively high, relatively strong signals can be obtained by virtue o |
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