Basket fixing mechanism for wafer drying

Basket fixing mechanism for wafer drying

The basket fixing mechanism for wafer drying comprises a mounting plate, two supporting plates are fixedly connected to the top of the mounting plate, placing plates are fixedly connected to the opposite sides of the two supporting plates, a plurality of placing grooves are formed in the side walls...

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1. Verfasser: YANG YINBO
Format: Patent
Sprache:chi ; eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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description The basket fixing mechanism for wafer drying comprises a mounting plate, two supporting plates are fixedly connected to the top of the mounting plate, placing plates are fixedly connected to the opposite sides of the two supporting plates, a plurality of placing grooves are formed in the side walls of the placing plates, clamping assemblies are connected to the inner tops and the inner bottoms of the placing grooves, and the clamping assemblies are fixedly connected to the top of the mounting plate. A connecting plate is fixedly connected between the two supporting plates, and the surfaces of the supporting plates are fixedly connected with limiting plates. According to the wafer lifting basket, the blocking plate, the limiting inserting strip, the pulling block and the limiting spring can be matched through the abutting assembly, wafers can be conveniently abutted through the limiting inserting strip, displacement of the wafers is further reduced, the wafers are prevented from falling off from the containing
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A connecting plate is fixedly connected between the two supporting plates, and the surfaces of the supporting plates are fixedly connected with limiting plates. 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A connecting plate is fixedly connected between the two supporting plates, and the surfaces of the supporting plates are fixedly connected with limiting plates. According to the wafer lifting basket, the blocking plate, the limiting inserting strip, the pulling block and the limiting spring can be matched through the abutting assembly, wafers can be conveniently abutted through the limiting inserting strip, displacement of the wafers is further reduced, the wafers are prevented from falling off from the containing</abstract><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Basket fixing mechanism for wafer drying
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