SUBSTRATE CARRIER, FILM FORMING SYSTEM AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

The invention provides a substrate carrier capable of suppressing peeling and vibration of a glass substrate, a film forming system, and a method for manufacturing an electronic device. A substrate carrier is provided with a plurality of substrate holders for holding and conveying a substrate vertic...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TSUDA KENTO, GUAN YIQING, HONDA ATSUO, SHIMOMURA YOSHIO, KOMURO YOSHITAMI, FUJIMURA HIDEHIKO, ARAI YUTAKA, OSHIMA YOSHITO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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