Semiconductor structure and preparation method thereof, three-dimensional memory and storage system

The invention provides a semiconductor structure and a preparation method thereof, a three-dimensional memory and a storage system, relates to the technical field of semiconductor chips, and aims to improve the manufacturing precision of a plurality of CT holes so as to improve the conductivity of c...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	WEI YUNONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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