MEMS micromirror array and manufacturing method thereof
The invention provides an MEMS micro-mirror array and a manufacturing method thereof, an MEMS micro-mirror substrate comprises MEMS micro-mirrors which are connected together and are distributed in an array, and the front surfaces of the MEMS micro-mirrors are provided with electrode bonding pads; t...
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| creator | LI FANGMENG XU JING LI WEI |
| description | The invention provides an MEMS micro-mirror array and a manufacturing method thereof, an MEMS micro-mirror substrate comprises MEMS micro-mirrors which are connected together and are distributed in an array, and the front surfaces of the MEMS micro-mirrors are provided with electrode bonding pads; the wiring substrate is provided with an opening, and the back surface of the wiring substrate is provided with a bonding pad; by fixing the wiring substrate above the MEMS micromirror substrate, the bonding pads are correspondingly and electrically connected with the electrode bonding pads, so that the MEMS micromirror substrate is directly and electrically connected with the wiring substrate, and the open holes and the reflectors are arranged in a one-to-one correspondence manner to expose the reflectors. According to the MEMS micromirror array, the transmission path can be reduced, the loss can be reduced, the yield of the MEMS micromirror array can be remarkably improved, the processing and manufacturing difficu |
| format | Patent |
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| language | chi ; eng |
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| subjects | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING |
| title | MEMS micromirror array and manufacturing method thereof |
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