Integrated circuit production and processing equipment for computer
The integrated circuit production and processing equipment for the computer comprises a carrying seat, an inflation seat is fixedly installed on the carrying seat, the inflation seat is connected to an inert gas storage tank in the carrying seat through a conveying pipe, and a loading seat is fixedl...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The integrated circuit production and processing equipment for the computer comprises a carrying seat, an inflation seat is fixedly installed on the carrying seat, the inflation seat is connected to an inert gas storage tank in the carrying seat through a conveying pipe, and a loading seat is fixedly installed on the inflation seat; a separation loading part and a closing part are arranged in the loading seat, a wafer is positioned and fixed through the separation loading part, the space of the loading seat is sealed through the closing part, and a starting switch of the closing part is located below the separation loading part. The height of the starting switch is adjusted through an adjusting structure on the carrying seat, and a balance weighing structure is arranged at the bottom of the separated loading part; the integrated circuit production and processing equipment is used for safe transfer of wafers, the effects of automatic sealing and inert gas protection after a certain amount of wafers are loaded |
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