Liquid distributor and wet chemical treatment tank comprising same

Liquid distributor and wet chemical treatment tank comprising same

The invention provides a liquid distributor and a wet chemical treatment tank, relates to the technical field of semiconductor manufacturing, and solves the technical problems that etching agent solutions at different positions of a treatment tank are different in concentration, and the etching rate...

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Hauptverfasser: LIU KANGHUA, ZHAO DAGUO, YAN QIANG, CHENG JIANGYAN, ZHU YANJUN, WANG YAOLIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator LIU KANGHUA
ZHAO DAGUO
YAN QIANG
CHENG JIANGYAN
ZHU YANJUN
WANG YAOLIN
description The invention provides a liquid distributor and a wet chemical treatment tank, relates to the technical field of semiconductor manufacturing, and solves the technical problems that etching agent solutions at different positions of a treatment tank are different in concentration, and the etching rate is very nonuniform. The liquid distributor comprises a distributor body, a fluid channel for fluid circulation is arranged in the distributor body, a plurality of liquid outlets are formed in the side wall of the distributor body, and all the liquid outlets are different in specification and are sequentially enlarged from one side to the other side; the wet chemical treatment tank comprises a tank body, a liquid distributor is arranged in the tank body, and a liquid inlet communicated with the outside of the tank body and the fluid channel is further formed in the tank body; the liquid outlet close to one side of the liquid inlet has the smallest specification; the groove body comprises a first side wall and a sec
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Liquid distributor and wet chemical treatment tank comprising same
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