Novel low-temperature plasma operation device and control system thereof

The invention discloses a novel low-temperature plasma operation device which comprises a main machine, a pedal, a flow controller and an operation electrode, the main machine is connected with an external power source and connected with the pedal, the flow controller and the operation electrode, th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU YUEYU, DAN JIABING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a novel low-temperature plasma operation device which comprises a main machine, a pedal, a flow controller and an operation electrode, the main machine is connected with an external power source and connected with the pedal, the flow controller and the operation electrode, the operation electrode comprises a shell, a shortcut key and a signal collecting point, the shortcut key is arranged on the shell, and the signal collecting point is arranged on the shell. The signal acquisition point is arranged at the front end of the operation electrode; the invention further provides a novel low-temperature plasma operation control system. The novel low-temperature plasma operation control system comprises a main control module, a driving circuit, an energy output circuit, a detection module, an acquisition module and an operation electrode. According to the invention, the situation that the real-time states of temperature, impedance, inductive reactance, capacitive reactance and the like of tis