Array type in-situ detection system and method for measuring multiple parameters of alkali metal gas chamber

The invention relates to an array type in-situ detection system and method for alkali metal gas chamber multi-parameter measurement. The array type in-situ detection system comprises a laser, a beam expanding light path, a diffusion sheet laser homogenizing light path, a double-microlens array homog...

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Hauptverfasser: LOU GUIYANG, ZHAO BINGQUAN, WANG JIANLONG, ZHAO XIAOMING, DONG LIHONG, GAO HONGYU
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to an array type in-situ detection system and method for alkali metal gas chamber multi-parameter measurement. The array type in-situ detection system comprises a laser, a beam expanding light path, a diffusion sheet laser homogenizing light path, a double-microlens array homogenizing light path, a polarizer, a detected alkali metal gas chamber, an attenuation sheet and a CCD imaging system which are connected in sequence, light beams emitted by the laser device are expanded through the beam expanding light path, then the light beams are subjected to primary homogenization treatment through the diffusion sheet laser homogenization light path, and then the light beams pass through the double-micro-lens array homogenization light path, so that the light beams emitted by the laser device are uniform light beam arrays. The emitted light beam array is polarized by a polarizer, so that the emitted light beam array is linear polarization laser with higher polarization degree; and then the light