System and method for imaging sample with illumination source modified by spatially selective wavelength filter

The invention relates to systems and methods for imaging a sample with an illumination source modified by a spatially selective wavelength filter. The system includes a wavelength filtering subsystem, a sample stage, an illumination subsystem, a detector, and an objective lens to focus illumination...

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Bibliographische Detailangaben

Hauptverfasser:	BEZEL ILYA, PANZER MATTHEW, ZHAO WEI, GROSS KENNETH P
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING X-RAY TECHNIQUE
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