Method for tracking and identifying components of lithographic system and lithographic system

The invention relates to a method for tracking and identifying a component (1) of a lithography system, in particular of a projection exposure apparatus (100, 200, 400) for semiconductor lithography. Each of the components (1) has at least one transponder (2). The transponder (2) has a data memory (...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	WOLSING CHRISTOPH, KAMP-FROESE MARKUS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CALCULATING CINEMATOGRAPHY COMPUTING COUNTING ELECTROGRAPHY HANDLING RECORD CARRIERS HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The invention relates to a method for tracking and identifying a component (1) of a lithography system, in particular of a projection exposure apparatus (100, 200, 400) for semiconductor lithography. Each of the components (1) has at least one transponder (2). The transponder (2) has a data memory (3) on which data relating to the components (1) is stored. The transponder (2) is arranged to pick up a wireless arrival signal of a reader (4) and to employ a data response from the data memory (3). 本发明关于一种用于追踪与识别光刻系统，特别是用于半导体光刻的投射曝光装置(100,200,400)的部件(1)的方法。所述部件(1)中的每一个具有至少一个转发器(2)。该转发器(2)具有数据存储器(3)，其上储存有关各部件(1)的数据。该转发器(2)设置成拾取读取器(4)的无线抵达信号并采用来自该数据存储器(3)的数据响应。