Memory, preparation method thereof and memory system

The invention discloses a memory, a preparation method thereof and a memory system, a stack layer is formed on a substrate, and the stack layer comprises a first area and a second area adjacent to the first area; a patterned hard mask layer is formed on the stacking layer, a first stop layer coverin...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GAO JING, HUO ZONGLIANG, ZHANG WENYAO, ZHANG HAO, LIU SHASHA, HUANG WENLONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!