Compensation light path structure for improving measurement precision

The disclosure describes a compensation light path structure for improving measurement accuracy, a reconstruction device comprises a measurement light path structure for acquiring the initial height of a target point and a compensation light path structure, and the compensation light path structure...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHANG HEJUN, ZHANG HUJIE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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