Compensation light path structure for improving measurement precision

The disclosure describes a compensation light path structure for improving measurement accuracy, a reconstruction device comprises a measurement light path structure for acquiring the initial height of a target point and a compensation light path structure, and the compensation light path structure comprises a first generation module, a light splitting module, an interference objective lens and a data processing module. The first generation module is used for generating a compensation light beam with the bandwidth not larger than a first preset value, the light splitting module comprises a first light splitting unit and a second light splitting unit, the first light splitting unit is configured to receive the compensation light beam and reflect the compensation light beam to the interference objective lens, and the compensation light beam forms a compensation reflection light beam on the interference objective lens; and the data processing module compensates the initial height based on the compensation reflec