Composite vacuum coating equipment and use method thereof
The invention discloses vacuum composite coating equipment and a using method thereof. The equipment comprises a vacuum chamber, an arc discharge module, a gas ion source, a high-power magnetic control discharge module, a workpiece rotating system and a heating system. The cleaning plasma of the arc...
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| creator | SU XIONGYU CUI SUIHAN MA MINYU WU ZHONGZHEN |
| description | The invention discloses vacuum composite coating equipment and a using method thereof. The equipment comprises a vacuum chamber, an arc discharge module, a gas ion source, a high-power magnetic control discharge module, a workpiece rotating system and a heating system. The cleaning plasma of the arc light enhancing structure or the gas ion source is used for efficiently cleaning the workpiece, and high-density electrons generated by arc discharge are used for efficiently ionizing N2 for low-temperature ion nitriding; a high-power pulse magnetron sputtering technology is used for generating high-strength clean metal plasma to conduct ion bombardment on the interface, the interface is activated, and a transition layer is prepared; a continuous high-power magnetron sputtering technology is adopted to realize rapid growth of a particle-free and compact coating, or a gas ion source is adopted to carry out vapor-phase plasma deposition on a DLC (Diamond Like Carbon) coating. Advanced permeating and plating processe |
| format | Patent |
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The equipment comprises a vacuum chamber, an arc discharge module, a gas ion source, a high-power magnetic control discharge module, a workpiece rotating system and a heating system. The cleaning plasma of the arc light enhancing structure or the gas ion source is used for efficiently cleaning the workpiece, and high-density electrons generated by arc discharge are used for efficiently ionizing N2 for low-temperature ion nitriding; a high-power pulse magnetron sputtering technology is used for generating high-strength clean metal plasma to conduct ion bombardment on the interface, the interface is activated, and a transition layer is prepared; a continuous high-power magnetron sputtering technology is adopted to realize rapid growth of a particle-free and compact coating, or a gas ion source is adopted to carry out vapor-phase plasma deposition on a DLC (Diamond Like Carbon) coating. 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| language | chi ; eng |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Composite vacuum coating equipment and use method thereof |
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