Composite vacuum coating equipment and use method thereof

The invention discloses vacuum composite coating equipment and a using method thereof. The equipment comprises a vacuum chamber, an arc discharge module, a gas ion source, a high-power magnetic control discharge module, a workpiece rotating system and a heating system. The cleaning plasma of the arc light enhancing structure or the gas ion source is used for efficiently cleaning the workpiece, and high-density electrons generated by arc discharge are used for efficiently ionizing N2 for low-temperature ion nitriding; a high-power pulse magnetron sputtering technology is used for generating high-strength clean metal plasma to conduct ion bombardment on the interface, the interface is activated, and a transition layer is prepared; a continuous high-power magnetron sputtering technology is adopted to realize rapid growth of a particle-free and compact coating, or a gas ion source is adopted to carry out vapor-phase plasma deposition on a DLC (Diamond Like Carbon) coating. Advanced permeating and plating processe