MEMS element and electro-acoustic conversion device

MEMS element and electro-acoustic conversion device

The invention discloses an MEMS element and an electro-acoustic conversion device. The MEMS element comprises a substrate, a first electrode, a second electrode, a third electrode and a fourth electrode, the vibrating diaphragm is connected with the substrate and covers the cavity, the vibrating dia...

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Hauptverfasser: PIERRE, CEFRAND, YANNICK, WEI HONGZHONG COLIN, JENKINS COLIN ROBERT, JAMES, BODUIAN, GARG SCOTT LYLE
Format: Patent
Sprache:chi ; eng
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DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
PUBLIC ADDRESS SYSTEMS
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creator PIERRE, CEFRAND, YANNICK
WEI HONGZHONG COLIN
JENKINS COLIN ROBERT
JAMES, BODUIAN
GARG SCOTT LYLE
description The invention discloses an MEMS element and an electro-acoustic conversion device. The MEMS element comprises a substrate, a first electrode, a second electrode, a third electrode and a fourth electrode, the vibrating diaphragm is connected with the substrate and covers the cavity, the vibrating diaphragm comprises a first diaphragm and a second diaphragm which are oppositely arranged, the first diaphragm is located on the side, away from the cavity, of the second diaphragm, and the first diaphragm comprises a first protrusion protruding out of the first diaphragm; the second diaphragm comprises a second protrusion protruding out of the second diaphragm, the second protrusion extends towards the side away from the first diaphragm, and the second protrusion and the first protrusion are oppositely arranged. The first diaphragm is provided with the first bulge, the second diaphragm is provided with the second bulge, and the first bulge and the second bulge are combined to form the corrugated vibrating diaphragm,
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The MEMS element comprises a substrate, a first electrode, a second electrode, a third electrode and a fourth electrode, the vibrating diaphragm is connected with the substrate and covers the cavity, the vibrating diaphragm comprises a first diaphragm and a second diaphragm which are oppositely arranged, the first diaphragm is located on the side, away from the cavity, of the second diaphragm, and the first diaphragm comprises a first protrusion protruding out of the first diaphragm; the second diaphragm comprises a second protrusion protruding out of the second diaphragm, the second protrusion extends towards the side away from the first diaphragm, and the second protrusion and the first protrusion are oppositely arranged. 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subjects DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
PUBLIC ADDRESS SYSTEMS
title MEMS element and electro-acoustic conversion device
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