Solar cell and processing method thereof
The invention discloses a solar cell and a processing method thereof, and the method comprises the steps: providing a silicon substrate, and enabling one surface of the silicon substrate to be provided with a grid line contact region and a non-grid line contact region; forming a hole surface structu...
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| creator | ZHONG CHUNHUA WANG JIANBO MING WEIHUI PEI HAIYANG QIU JIANGNAN LYU JUN |
| description | The invention discloses a solar cell and a processing method thereof, and the method comprises the steps: providing a silicon substrate, and enabling one surface of the silicon substrate to be provided with a grid line contact region and a non-grid line contact region; forming a hole surface structure in the grid line contact area; a first silicon oxide layer and a first polycrystalline silicon layer are sequentially deposited on the hole surface structure, the first polycrystalline silicon layer is formed in an in-situ doping deposition mode, and the first polycrystalline silicon layer has a first doping concentration; sequentially depositing a second silicon dioxide layer and a second polycrystalline silicon layer on the non-grid line contact region; doping the second polycrystalline silicon layer to obtain a second polycrystalline silicon layer with a second doping concentration, the second doping concentration being smaller than the first doping concentration; and forming a grid line in the grid line cont |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | Solar cell and processing method thereof |
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