Vertical cavity surface emitting laser and forming method thereof

Vertical cavity surface emitting laser and forming method thereof

The invention provides a vertical cavity surface emitting laser and a forming method thereof. The vertical cavity surface emitting laser comprises a substrate, a first mirror, an active layer, an oxide layer, a hole, a second mirror, a high-contrast grating and a passivation layer. The first mirror...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: CHEN YUJUN, ZHANG JIADA, HUANG YUXUAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator CHEN YUJUN
ZHANG JIADA
HUANG YUXUAN
description The invention provides a vertical cavity surface emitting laser and a forming method thereof. The vertical cavity surface emitting laser comprises a substrate, a first mirror, an active layer, an oxide layer, a hole, a second mirror, a high-contrast grating and a passivation layer. The first mirror is located on the substrate. The active layer is located on the first mirror. And the oxide layer is positioned on the active layer. And the pores are positioned on the active layer and are surrounded by the oxide layer. And the second mirror is positioned on the hole and the oxide layer. The high-contrast grating is located on the second mirror, the high-contrast grating comprises a first grating part and a second grating part, and an air gap is formed between the first grating part and the second grating part; and a passivation layer over the high contrast grating, a first thickness of the passivation layer on the top surface of the first grating part being greater than a second thickness of the passivation layer
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN114696215A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN114696215A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN114696215A3</originalsourceid><addsrcrecordid>eNrjZHAMSy0qyUxOzFFITizLLKlUKC4tSktMTlVIzc0sKcnMS1fISSxOLVJIzEtRSMsvygWJ5KaWZOSnKJRkpBal5qfxMLCmJeYUp_JCaW4GRTfXEGcP3dSC_PjU4gKgYXmpJfHOfoaGJmaWZkaGpo7GxKgBACQDMew</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Vertical cavity surface emitting laser and forming method thereof</title><source>esp@cenet</source><creator>CHEN YUJUN ; ZHANG JIADA ; HUANG YUXUAN</creator><creatorcontrib>CHEN YUJUN ; ZHANG JIADA ; HUANG YUXUAN</creatorcontrib><description>The invention provides a vertical cavity surface emitting laser and a forming method thereof. The vertical cavity surface emitting laser comprises a substrate, a first mirror, an active layer, an oxide layer, a hole, a second mirror, a high-contrast grating and a passivation layer. The first mirror is located on the substrate. The active layer is located on the first mirror. And the oxide layer is positioned on the active layer. And the pores are positioned on the active layer and are surrounded by the oxide layer. And the second mirror is positioned on the hole and the oxide layer. The high-contrast grating is located on the second mirror, the high-contrast grating comprises a first grating part and a second grating part, and an air gap is formed between the first grating part and the second grating part; and a passivation layer over the high contrast grating, a first thickness of the passivation layer on the top surface of the first grating part being greater than a second thickness of the passivation layer</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; DEVICES USING STIMULATED EMISSION ; ELECTRICITY</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20220701&amp;DB=EPODOC&amp;CC=CN&amp;NR=114696215A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25562,76317</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20220701&amp;DB=EPODOC&amp;CC=CN&amp;NR=114696215A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHEN YUJUN</creatorcontrib><creatorcontrib>ZHANG JIADA</creatorcontrib><creatorcontrib>HUANG YUXUAN</creatorcontrib><title>Vertical cavity surface emitting laser and forming method thereof</title><description>The invention provides a vertical cavity surface emitting laser and a forming method thereof. The vertical cavity surface emitting laser comprises a substrate, a first mirror, an active layer, an oxide layer, a hole, a second mirror, a high-contrast grating and a passivation layer. The first mirror is located on the substrate. The active layer is located on the first mirror. And the oxide layer is positioned on the active layer. And the pores are positioned on the active layer and are surrounded by the oxide layer. And the second mirror is positioned on the hole and the oxide layer. The high-contrast grating is located on the second mirror, the high-contrast grating comprises a first grating part and a second grating part, and an air gap is formed between the first grating part and the second grating part; and a passivation layer over the high contrast grating, a first thickness of the passivation layer on the top surface of the first grating part being greater than a second thickness of the passivation layer</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>DEVICES USING STIMULATED EMISSION</subject><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHAMSy0qyUxOzFFITizLLKlUKC4tSktMTlVIzc0sKcnMS1fISSxOLVJIzEtRSMsvygWJ5KaWZOSnKJRkpBal5qfxMLCmJeYUp_JCaW4GRTfXEGcP3dSC_PjU4gKgYXmpJfHOfoaGJmaWZkaGpo7GxKgBACQDMew</recordid><startdate>20220701</startdate><enddate>20220701</enddate><creator>CHEN YUJUN</creator><creator>ZHANG JIADA</creator><creator>HUANG YUXUAN</creator><scope>EVB</scope></search><sort><creationdate>20220701</creationdate><title>Vertical cavity surface emitting laser and forming method thereof</title><author>CHEN YUJUN ; ZHANG JIADA ; HUANG YUXUAN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN114696215A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2022</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>DEVICES USING STIMULATED EMISSION</topic><topic>ELECTRICITY</topic><toplevel>online_resources</toplevel><creatorcontrib>CHEN YUJUN</creatorcontrib><creatorcontrib>ZHANG JIADA</creatorcontrib><creatorcontrib>HUANG YUXUAN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHEN YUJUN</au><au>ZHANG JIADA</au><au>HUANG YUXUAN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Vertical cavity surface emitting laser and forming method thereof</title><date>2022-07-01</date><risdate>2022</risdate><abstract>The invention provides a vertical cavity surface emitting laser and a forming method thereof. The vertical cavity surface emitting laser comprises a substrate, a first mirror, an active layer, an oxide layer, a hole, a second mirror, a high-contrast grating and a passivation layer. The first mirror is located on the substrate. The active layer is located on the first mirror. And the oxide layer is positioned on the active layer. And the pores are positioned on the active layer and are surrounded by the oxide layer. And the second mirror is positioned on the hole and the oxide layer. The high-contrast grating is located on the second mirror, the high-contrast grating comprises a first grating part and a second grating part, and an air gap is formed between the first grating part and the second grating part; and a passivation layer over the high contrast grating, a first thickness of the passivation layer on the top surface of the first grating part being greater than a second thickness of the passivation layer</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language chi ; eng
recordid cdi_epo_espacenet_CN114696215A
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
title Vertical cavity surface emitting laser and forming method thereof
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-13T20%3A17%3A18IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=CHEN%20YUJUN&rft.date=2022-07-01&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN114696215A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true