In-situ monitoring of substrate surfaces

In some examples, a vacuum pre-processing module (VPM) metrology system is provided for measuring sheet resistance of a layer on a substrate. The system may include an eddy current sensor including a transmitter sensor and a receiver sensor, the transmitter sensor and the receiver sensor defining a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PFAU ANDREW JAMES, KOHLER DOUGLAS, GUEDI, SHANDINATH, WILLIAMS BURTON, RANJAN MANISH, HILL DOUGLAS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METALLURGY PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING
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