Probe card integrating different electrical tests

The invention relates to a probe card integrating different electrical property tests, which is used for testing the electrical property of an object to be tested and comprises a plurality of probes and a probe seat. The plurality of probes includes at least one impedance matching probe and a plural...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHANG JIATAI, SU ZHENGNIAN, YANG JINTIAN, CAI JINYI, YU CHENZHI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a probe card integrating different electrical property tests, which is used for testing the electrical property of an object to be tested and comprises a plurality of probes and a probe seat. The plurality of probes includes at least one impedance matching probe and a plurality of cantilever probes. The probe seat comprises a circuit substrate and a fixed substrate. The circuit substrate is provided with a first through hole. The fixed substrate has a second through hole. The fixed substrate is arranged on the circuit substrate, the second through hole corresponds to the first through hole, the aperture of the first through hole is larger than that of the second through hole, at least one impedance matching probe penetrates through the first through hole and is arranged on the fixed substrate, and the probe part of each impedance matching probe penetrates through the second through hole; one end of the cantilever section of each cantilever probe is electrically connected with the circ