AFM probe measurement method and device, control equipment and storage medium

The invention provides an AFM probe measurement method and device, control equipment and a storage medium. The method comprises the following steps: scanning a to-be-measured line by using an AFM probe to obtain a to-be-measured curve of the to-be-measured line; determining a left-side to-be-measured curve and a right-side to-be-measured curve of the to-be-measured line by taking the vertex of the to-be-measured curve as a center; and respectively solving a left AFM probe curve and a right AFM probe curve of the to-be-measured line by taking the transverse resolution of the AFM as a step, and obtaining a real contour of the to-be-measured line according to the left to-be-measured curve, the right to-be-measured curve, the left AFM probe curve and the right AFM probe curve. According to the invention, the measurement accuracy of the AFM probe can be improved. 本发明提供一种AFM探针测量方法、装置、控制设备及存储介质。该方法包括：利用AFM探针扫描待测线条，得到待测线条的待测曲线；以待测曲线的顶点为中心，确定待测线条的左侧待测曲线和右侧待测曲线；以AFM的横向分辨率为步进，分别求解待测线条的左侧AFM探针曲线和右侧AFM探针曲线，并根据左侧待测曲线、右侧待测曲