Film coating method using hybridized mixed refractive index material
The invention discloses a film coating method using a hybrid mixed refractive index material, which comprises the following steps of: performing optical film coating by taking PET (Polyethylene Terephthalate) plastic/glass/ceramic as a substrate and using SiO2 with low refractive index, Si3N4 or Sia...
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| creator | BI WENJIANG ZHAO ERSHUAI PENG YANG ZHU JINBO NIU YANCI LEI MINGYU LI ZHICHAO YANG QUANZHU WANG LONG |
| description | The invention discloses a film coating method using a hybrid mixed refractive index material, which comprises the following steps of: performing optical film coating by taking PET (Polyethylene Terephthalate) plastic/glass/ceramic as a substrate and using SiO2 with low refractive index, Si3N4 or SiaNbbOc or SipTiqOr with high refractive index and the like by using magnetron sputtering equipment or electron beam evaporation equipment. According to the invention, the film coating technology of optical deposition is realized by using the low-refractive-index layer, the high-refractive-index layer and the mixed material refractive-index layer which are crossed. Compared with a traditional high and low refractive index laminated structure, the mixed refractive index layer can realize convenient regulation and control of reflection/transmission intensity, and the hardness and stress performance of a film layer material can be adjusted, so that the physical performance of a more tough film layer can be matched.
本发明公 |
| format | Patent |
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本发明公</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Film coating method using hybridized mixed refractive index material |
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