Alkali-soluble polymer for preparing LDI dry film and preparation method of alkali-soluble polymer
The invention relates to an alkali-soluble polymer for preparing an LDI dry film and a preparation method of the alkali-soluble polymer. The side chain of the alkali-soluble polymer provided by the invention has an oxetane group; and the polymerization unit containing the oxetane group accounts for...
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| creator | WANG YIJUN ZOU YINGQUAN LIU MINGKE BAO CHUNYANG ZHAO FENGJIAO ZHANG QIANG CHEN JING |
| description | The invention relates to an alkali-soluble polymer for preparing an LDI dry film and a preparation method of the alkali-soluble polymer. The side chain of the alkali-soluble polymer provided by the invention has an oxetane group; and the polymerization unit containing the oxetane group accounts for 1-65% of the alkali-soluble polymer in percentage by mass. The alkali-soluble polymer disclosed by the invention is prepared by adopting a free radical polymerization method. The alkali-soluble polymer is used for preparing the LDI dry film, the LDI dry film prepared by matching the alkali-soluble polymer and a cationic initiator is directly exposed through laser, and compared with the LDI dry film in the prior art, the LDI dry film has good sensitivity, resolution, sealing performance, hole covering rate and resist shape.
本发明涉及一种用于制备LDI干膜的碱溶性聚合物及其制备方法。根据本发明的碱溶性聚合物侧链具有氧杂环丁烷基团；且含氧杂环丁烷基团的聚合单元在碱溶性聚合物中占以质量百分比计的1~65%。本发明采用了自由基聚合法制备得到了本发明的碱溶性聚合物。将本发明的碱溶性聚合物用于制备LDI干膜，通过激光对采用碱溶性聚合物和阳离子引发剂配合制备得到的LDI干膜进行直接曝光，LDI干膜相对于现有技术的LDI |
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本发明涉及一种用于制备LDI干膜的碱溶性聚合物及其制备方法。根据本发明的碱溶性聚合物侧链具有氧杂环丁烷基团；且含氧杂环丁烷基团的聚合单元在碱溶性聚合物中占以质量百分比计的1~65%。本发明采用了自由基聚合法制备得到了本发明的碱溶性聚合物。将本发明的碱溶性聚合物用于制备LDI干膜，通过激光对采用碱溶性聚合物和阳离子引发剂配合制备得到的LDI干膜进行直接曝光，LDI干膜相对于现有技术的LDI</description><language>chi ; eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ; CHEMISTRY ; CINEMATOGRAPHY ; COMPOSITIONS BASED THEREON ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; ELECTROGRAPHY ; HOLOGRAPHY ; MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS ; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS ; MATERIALS THEREFOR ; METALLURGY ; ORGANIC MACROMOLECULAR COMPOUNDS ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; PRINTED CIRCUITS ; THEIR PREPARATION OR CHEMICAL WORKING-UP</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220308&DB=EPODOC&CC=CN&NR=114149530A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220308&DB=EPODOC&CC=CN&NR=114149530A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WANG YIJUN</creatorcontrib><creatorcontrib>ZOU YINGQUAN</creatorcontrib><creatorcontrib>LIU MINGKE</creatorcontrib><creatorcontrib>BAO CHUNYANG</creatorcontrib><creatorcontrib>ZHAO FENGJIAO</creatorcontrib><creatorcontrib>ZHANG QIANG</creatorcontrib><creatorcontrib>CHEN JING</creatorcontrib><title>Alkali-soluble polymer for preparing LDI dry film and preparation method of alkali-soluble polymer</title><description>The invention relates to an alkali-soluble polymer for preparing an LDI dry film and a preparation method of the alkali-soluble polymer. The side chain of the alkali-soluble polymer provided by the invention has an oxetane group; and the polymerization unit containing the oxetane group accounts for 1-65% of the alkali-soluble polymer in percentage by mass. The alkali-soluble polymer disclosed by the invention is prepared by adopting a free radical polymerization method. The alkali-soluble polymer is used for preparing the LDI dry film, the LDI dry film prepared by matching the alkali-soluble polymer and a cationic initiator is directly exposed through laser, and compared with the LDI dry film in the prior art, the LDI dry film has good sensitivity, resolution, sealing performance, hole covering rate and resist shape.
本发明涉及一种用于制备LDI干膜的碱溶性聚合物及其制备方法。根据本发明的碱溶性聚合物侧链具有氧杂环丁烷基团；且含氧杂环丁烷基团的聚合单元在碱溶性聚合物中占以质量百分比计的1~65%。本发明采用了自由基聚合法制备得到了本发明的碱溶性聚合物。将本发明的碱溶性聚合物用于制备LDI干膜，通过激光对采用碱溶性聚合物和阳离子引发剂配合制备得到的LDI干膜进行直接曝光，LDI干膜相对于现有技术的LDI</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</subject><subject>CHEMISTRY</subject><subject>CINEMATOGRAPHY</subject><subject>COMPOSITIONS BASED THEREON</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS</subject><subject>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</subject><subject>MATERIALS THEREFOR</subject><subject>METALLURGY</subject><subject>ORGANIC MACROMOLECULAR COMPOUNDS</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><subject>PRINTED CIRCUITS</subject><subject>THEIR PREPARATION OR CHEMICAL WORKING-UP</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZEhyzMlOzMnULc7PKU3KSVUoyM-pzE0tUkjLL1IoKEotSCzKzEtX8HHxVEgpqlRIy8zJVUjMS4FKJZZk5ucp5KaWZOSnKOSnKSRiNYuHgTUtMac4lRdKczMourmGOHvophbkx6cWFyQmp-allsQ7-xkamhiaWJoaGzgaE6MGADFHPeA</recordid><startdate>20220308</startdate><enddate>20220308</enddate><creator>WANG YIJUN</creator><creator>ZOU YINGQUAN</creator><creator>LIU MINGKE</creator><creator>BAO CHUNYANG</creator><creator>ZHAO FENGJIAO</creator><creator>ZHANG QIANG</creator><creator>CHEN JING</creator><scope>EVB</scope></search><sort><creationdate>20220308</creationdate><title>Alkali-soluble polymer for preparing LDI dry film and preparation method of alkali-soluble polymer</title><author>WANG YIJUN ; ZOU YINGQUAN ; LIU MINGKE ; BAO CHUNYANG ; ZHAO FENGJIAO ; ZHANG QIANG ; CHEN JING</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN114149530A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2022</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</topic><topic>CHEMISTRY</topic><topic>CINEMATOGRAPHY</topic><topic>COMPOSITIONS BASED THEREON</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS</topic><topic>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</topic><topic>MATERIALS THEREFOR</topic><topic>METALLURGY</topic><topic>ORGANIC MACROMOLECULAR COMPOUNDS</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><topic>PRINTED CIRCUITS</topic><topic>THEIR PREPARATION OR CHEMICAL WORKING-UP</topic><toplevel>online_resources</toplevel><creatorcontrib>WANG YIJUN</creatorcontrib><creatorcontrib>ZOU YINGQUAN</creatorcontrib><creatorcontrib>LIU MINGKE</creatorcontrib><creatorcontrib>BAO CHUNYANG</creatorcontrib><creatorcontrib>ZHAO FENGJIAO</creatorcontrib><creatorcontrib>ZHANG QIANG</creatorcontrib><creatorcontrib>CHEN JING</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>WANG YIJUN</au><au>ZOU YINGQUAN</au><au>LIU MINGKE</au><au>BAO CHUNYANG</au><au>ZHAO FENGJIAO</au><au>ZHANG QIANG</au><au>CHEN JING</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Alkali-soluble polymer for preparing LDI dry film and preparation method of alkali-soluble polymer</title><date>2022-03-08</date><risdate>2022</risdate><abstract>The invention relates to an alkali-soluble polymer for preparing an LDI dry film and a preparation method of the alkali-soluble polymer. The side chain of the alkali-soluble polymer provided by the invention has an oxetane group; and the polymerization unit containing the oxetane group accounts for 1-65% of the alkali-soluble polymer in percentage by mass. The alkali-soluble polymer disclosed by the invention is prepared by adopting a free radical polymerization method. The alkali-soluble polymer is used for preparing the LDI dry film, the LDI dry film prepared by matching the alkali-soluble polymer and a cationic initiator is directly exposed through laser, and compared with the LDI dry film in the prior art, the LDI dry film has good sensitivity, resolution, sealing performance, hole covering rate and resist shape.
本发明涉及一种用于制备LDI干膜的碱溶性聚合物及其制备方法。根据本发明的碱溶性聚合物侧链具有氧杂环丁烷基团；且含氧杂环丁烷基团的聚合单元在碱溶性聚合物中占以质量百分比计的1~65%。本发明采用了自由基聚合法制备得到了本发明的碱溶性聚合物。将本发明的碱溶性聚合物用于制备LDI干膜，通过激光对采用碱溶性聚合物和阳离子引发剂配合制备得到的LDI干膜进行直接曝光，LDI干膜相对于现有技术的LDI</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CHEMISTRY CINEMATOGRAPHY COMPOSITIONS BASED THEREON ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MATERIALS THEREFOR METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PRINTED CIRCUITS THEIR PREPARATION OR CHEMICAL WORKING-UP |
| title | Alkali-soluble polymer for preparing LDI dry film and preparation method of alkali-soluble polymer |
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