Byproduct collecting device of semiconductor equipment and semiconductor equipment
The invention provides a by-product collecting device of semiconductor equipment and the semiconductor equipment, the by-product collecting device of the semiconductor equipment comprises a condensation part, a connecting pipeline, a collecting part and a dredging assembly, the condensation part is...
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| creator | YAN SHIQUAN CHEN JIANSHENG |
| description | The invention provides a by-product collecting device of semiconductor equipment and the semiconductor equipment, the by-product collecting device of the semiconductor equipment comprises a condensation part, a connecting pipeline, a collecting part and a dredging assembly, the condensation part is communicated with an exhaust device of the semiconductor equipment and is used for cooling gaseous by-products discharged by the exhaust device, and the connecting pipeline is communicated with the collecting part; the connecting pipeline communicates with the condensing component and the collecting component, the dredging assembly is used for scraping the liquid by-products attached to the interior of the connecting pipeline so as to dredge the connecting pipeline, and the connecting pipeline is used for guiding the liquid by-products from the condensing component to the collecting component. And the collecting part is used for collecting liquid by-products. According to the by-product collecting device of the sem |
| format | Patent |
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| language | chi ; eng |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING |
| title | Byproduct collecting device of semiconductor equipment and semiconductor equipment |
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