Resonant sensor based on sideband excitation

Resonant sensor based on sideband excitation

The invention discloses a resonant sensor based on sideband excitation, which comprises an MEMS resonator and a feedback control system, the resonator comprises at least two electrodes, and the feedback control system is used for realizing feedback closed-loop control and adaptively adjusting the fr...

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Hauptverfasser: XI JINGQIAN, GAO LU, XU LEI, ZHAO CHUN
Format: Patent
Sprache:chi ; eng
Schlagworte:
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
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creator XI JINGQIAN
GAO LU
XU LEI
ZHAO CHUN
description The invention discloses a resonant sensor based on sideband excitation, which comprises an MEMS resonator and a feedback control system, the resonator comprises at least two electrodes, and the feedback control system is used for realizing feedback closed-loop control and adaptively adjusting the frequency of a sideband excitation signal in the sensing process so as to maintain the self-oscillation of the resonator. The feedback control system comprises a first feedback control circuit and a second feedback control circuit, the first feedback control circuit is used for tracking the frequency change of the first-order mode of the resonator in real time by detecting the phase difference change, so that the oscillation amplitude of the first-order mode of the resonator is demodulated, and a demodulation reference signal with the frequency equal to that of the oscillation fundamental frequency is generated; and the second feedback control circuit is used for outputting a sideband excitation signal by detecting t
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subjects CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
title Resonant sensor based on sideband excitation
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