MAGNETIC SENSOR

A magnetic sensor comprises: a non-magnetic substrate; and a sensing element 31 that has a lengthwise direction and a widthwise direction, has uniaxial magnetic anisotropy in a direction intersecting the lengthwise direction, and senses magnetic fields through the magnetic impedance effect. The sens...

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Bibliographische Detailangaben
Hauptverfasser: SAKAWAKI AKIRA, ENDO DAIZO, SHINO TATSUNORI, WATANABE YASUMASA, TONEGAWA SHO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A magnetic sensor comprises: a non-magnetic substrate; and a sensing element 31 that has a lengthwise direction and a widthwise direction, has uniaxial magnetic anisotropy in a direction intersecting the lengthwise direction, and senses magnetic fields through the magnetic impedance effect. The sensing element 31 comprises a plurality of soft-magnetic material layers 105a-105d, and a plurality of non-magnetic material layers 106a-106c formed from a non-magnetic material and layered between the plurality of soft-magnetic material layers 105a-105d. The soft-magnetic material layers 105a-105d are antiferromagnetically bonded to the soft-magnetic material layers on the opposite sides of the non-magnetic material layers 106a-106c respectively sandwiched therebetween. 磁传感器具备非磁性的基板和感应元件31,所述感应元件31具有长边方向和短边方向,在与长边方向交叉的方向上具有单轴磁各向异性,并通过磁阻抗效应来感应磁场,感应元件31具有多个软磁体层105a~105d、和由非磁体构成且层叠于多个软磁体层105a~105d之间的多个非磁体层106a~106c,夹着各个非磁体层106a~106c而相对的软磁体层105a~105d是经反铁磁性耦合的。