Image sensor and preparation method thereof

The invention provides an image sensor and a preparation method thereof. The image sensor comprises a substrate, and a protective layer, a third oxide layer and a barrier layer which are sequentially deposited on the substrate. And the third oxide layer is formed by back-etching a second oxide layer...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GONG BAIHUA, CAO YUJUAN, XIE RONGYUAN, MA ZHONGXIANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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