Semiconductor memory device and forming method thereof

The invention discloses a semiconductor memory device and a forming method thereof. The semiconductor memory device comprises a substrate, a plurality of bit lines, a plurality of plugs and a gap wall structure. The bit lines are arranged on the substrate in a mutually separated manner. The plugs ar...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: YAN YIFEI, CHEN KENLI, TONG YUCHENG
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!