LARGE-AREA HIGH-DENSITY PLASMA PROCESSING CHAMBER FOR FLAT PANEL DISPLAYS

Embodiments described herein provide a lid assembly of a chamber for independent control of plasma density and gas distribution within the interior volume of the chamber. The lid assembly includes a plasma generation system and a gas distribution assembly. The plasma generation system includes a plu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ANWAR SUHAIL, WU YUI LUN, SORENSEN CARL A, KUDELA JOZEF, SEQUEIRA JEEVAN PRAKASH
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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