Silicon carbide dynamic and static test all-in-one machine
The invention belongs to the technical field of semiconductor testing equipment, and particularly relates to a silicon carbide dynamic and static testing all-in-one machine which comprises a testing equipment body and a sample injection device, the sample injection device comprises a vertical frame,...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention belongs to the technical field of semiconductor testing equipment, and particularly relates to a silicon carbide dynamic and static testing all-in-one machine which comprises a testing equipment body and a sample injection device, the sample injection device comprises a vertical frame, the top of the vertical frame is rotationally connected with a movable column, and a wire is laid on the movable column; one end, connected with the interface end of a silicon carbide device, of the wire is connected with a conductive metal column, and the conductive metal column is fixed at the bottom of the movable column; a fixing frame is arranged on the side of the vertical column, and a sample storage box, a sample conveying device, a height adjusting device, a sample recycling box and a controller are installed on the fixing frame. The invention develops a sample injection device which is matched with silicon carbide test equipment, can continuously test and is suitable for dynamic and static combination te |
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