APPARATUS COMPRISING ELECTROSTATIC CLAMP AND METHOD
An apparatus comprising an electrostatic clamp for clamping a component, and a mechanism for generating free charges adjacent to the electrostatic clamp. The electrostatic clamp comprises an electrode or a plurality of electrodes. The apparatus is configured to: operate in a first mode in which the...
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| creator | YAKUNIN ANDREI VAN DER WILK RONALD VAN KAMPEN MAARTEN VAN DE KERKHOF MARCUS LASSISE ADAM |
| description | An apparatus comprising an electrostatic clamp for clamping a component, and a mechanism for generating free charges adjacent to the electrostatic clamp. The electrostatic clamp comprises an electrode or a plurality of electrodes. The apparatus is configured to: operate in a first mode in which the or each electrode is set at a potential such that clamping electric fields are generated between the electrostatic clamp and the component to clamp the component, operate in a second mode in which the or each potential of the or each electrode is set such that the component is unclamped, and operate in a third mode in which the or each potential of the or each electrode is set such that the flux of free charges generated by the mechanism to a surface of the component adjacent to the electrostatic clamp is increased in comparison with operating in the first or second mode.
一种设备，包括：静电夹具，所述静电夹具用于夹持部件；和用于在所述静电夹具相邻处产生自由电荷的机构。所述静电夹具包括一电极或多个电极。所述设备被配置成：在第一模式中操作，在所述第一模式中，所述电极或每个电极被设置处于一电位，使得在所述静电夹具与所述部件之间产生夹持电场以夹持所述部件；在第二模 |
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一种设备，包括：静电夹具，所述静电夹具用于夹持部件；和用于在所述静电夹具相邻处产生自由电荷的机构。所述静电夹具包括一电极或多个电极。所述设备被配置成：在第一模式中操作，在所述第一模式中，所述电极或每个电极被设置处于一电位，使得在所述静电夹具与所述部件之间产生夹持电场以夹持所述部件；在第二模</description><language>chi ; eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; BASIC ELECTRIC ELEMENTS ; CINEMATOGRAPHY ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; ELECTROGRAPHY ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; SEMICONDUCTOR DEVICES</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20211214&DB=EPODOC&CC=CN&NR=113795912A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20211214&DB=EPODOC&CC=CN&NR=113795912A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YAKUNIN ANDREI</creatorcontrib><creatorcontrib>VAN DER WILK RONALD</creatorcontrib><creatorcontrib>VAN KAMPEN MAARTEN</creatorcontrib><creatorcontrib>VAN DE KERKHOF MARCUS</creatorcontrib><creatorcontrib>LASSISE ADAM</creatorcontrib><title>APPARATUS COMPRISING ELECTROSTATIC CLAMP AND METHOD</title><description>An apparatus comprising an electrostatic clamp for clamping a component, and a mechanism for generating free charges adjacent to the electrostatic clamp. The electrostatic clamp comprises an electrode or a plurality of electrodes. The apparatus is configured to: operate in a first mode in which the or each electrode is set at a potential such that clamping electric fields are generated between the electrostatic clamp and the component to clamp the component, operate in a second mode in which the or each potential of the or each electrode is set such that the component is unclamped, and operate in a third mode in which the or each potential of the or each electrode is set such that the flux of free charges generated by the mechanism to a surface of the component adjacent to the electrostatic clamp is increased in comparison with operating in the first or second mode.
一种设备，包括：静电夹具，所述静电夹具用于夹持部件；和用于在所述静电夹具相邻处产生自由电荷的机构。所述静电夹具包括一电极或多个电极。所述设备被配置成：在第一模式中操作，在所述第一模式中，所述电极或每个电极被设置处于一电位，使得在所述静电夹具与所述部件之间产生夹持电场以夹持所述部件；在第二模</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CINEMATOGRAPHY</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDB2DAhwDHIMCQ1WcPb3DQjyDPb0c1dw9XF1DgnyDw5xDPF0VnD2cfQNUHD0c1HwdQ3x8HfhYWBNS8wpTuWF0twMim6uIc4euqkF-fGpxQWJyal5qSXxzn6GhsbmlqaWhkaOxsSoAQC34SdJ</recordid><startdate>20211214</startdate><enddate>20211214</enddate><creator>YAKUNIN ANDREI</creator><creator>VAN DER WILK RONALD</creator><creator>VAN KAMPEN MAARTEN</creator><creator>VAN DE KERKHOF MARCUS</creator><creator>LASSISE ADAM</creator><scope>EVB</scope></search><sort><creationdate>20211214</creationdate><title>APPARATUS COMPRISING ELECTROSTATIC CLAMP AND METHOD</title><author>YAKUNIN ANDREI ; VAN DER WILK RONALD ; VAN KAMPEN MAARTEN ; VAN DE KERKHOF MARCUS ; LASSISE ADAM</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN113795912A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2021</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CINEMATOGRAPHY</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>MATERIALS THEREFOR</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>YAKUNIN ANDREI</creatorcontrib><creatorcontrib>VAN DER WILK RONALD</creatorcontrib><creatorcontrib>VAN KAMPEN MAARTEN</creatorcontrib><creatorcontrib>VAN DE KERKHOF MARCUS</creatorcontrib><creatorcontrib>LASSISE ADAM</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>YAKUNIN ANDREI</au><au>VAN DER WILK RONALD</au><au>VAN KAMPEN MAARTEN</au><au>VAN DE KERKHOF MARCUS</au><au>LASSISE ADAM</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>APPARATUS COMPRISING ELECTROSTATIC CLAMP AND METHOD</title><date>2021-12-14</date><risdate>2021</risdate><abstract>An apparatus comprising an electrostatic clamp for clamping a component, and a mechanism for generating free charges adjacent to the electrostatic clamp. The electrostatic clamp comprises an electrode or a plurality of electrodes. The apparatus is configured to: operate in a first mode in which the or each electrode is set at a potential such that clamping electric fields are generated between the electrostatic clamp and the component to clamp the component, operate in a second mode in which the or each potential of the or each electrode is set such that the component is unclamped, and operate in a third mode in which the or each potential of the or each electrode is set such that the flux of free charges generated by the mechanism to a surface of the component adjacent to the electrostatic clamp is increased in comparison with operating in the first or second mode.
一种设备，包括：静电夹具，所述静电夹具用于夹持部件；和用于在所述静电夹具相邻处产生自由电荷的机构。所述静电夹具包括一电极或多个电极。所述设备被配置成：在第一模式中操作，在所述第一模式中，所述电极或每个电极被设置处于一电位，使得在所述静电夹具与所述部件之间产生夹持电场以夹持所述部件；在第二模</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES |
| title | APPARATUS COMPRISING ELECTROSTATIC CLAMP AND METHOD |
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