POLYGONAL TOROIDAL PLASMA SOURCE

A plasma source is provided that includes multiple metallic blocks. A toroidal plasma chamber and a transformer are substantially embedded in the metallic blocks. The toroidal plasma chamber includes a gas inlet configured to receive a process gas and a gas outlet configured to expel at least a portion of the process gas from the plasma chamber. The plasma chamber also includes multiple linear channel segments, multiple joints, an inlet joint, and an outlet joint machined into the metallic blocks. Each of the inlet joint, the outlet joint, and the joints connects a pair of the linear channel segments. The linear channel segments, the joints, the inlet joint and the outlet joint in combination form the toroidal plasma chamber. The gas inlet is disposed on the inlet joint. The gas outlet is disposed on the outlet joint. An inner angle of each of the joints is greater than about 90 degrees. 提供了一种包括多个金属块的等离子体源。环状等离子体室和变压器基本上嵌入于金属块中。环状等离子体室包括构造成接收过程气体的气体入口和构造成将过程气体的至少部分从等离子体室排出的气体出口。等离子体室还包括机加工到金属块中的出口接头、入口接头、多个接头