APERTURE ARRAY WITH INTEGRATED CURRENT MEASUREMENT

Systems and methods of measuring beam current in a multi-beam apparatus are disclosed. The multi-beam apparatus may include a charged-particle source configured to generate a primary charged-particle beam, and an aperture array. The aperture array may comprise a plurality of apertures configured to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SMAKMAN ERWIN PAUL, MANGNUS ALBERTUS V. G, GOOSEN MAIKEL ROBERT
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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