Library matching method and system for optical scattering, server and storage medium

Library matching method and system for optical scattering, server and storage medium

The invention relates to a library matching method and system for optical scattering, a server and a readable storage medium, and the method comprises the steps: building a theoretical spectrum library for a to-be-measured target, setting a nominal value of a morphology parameter, carrying out the i...

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Hauptverfasser: GUO CHUNFU, TAO ZE, SHI YUTUO, ZHANG HOUDAO, MA JUN, LI WEIQI
Format: Patent
Sprache:chi ; eng
Schlagworte:
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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creator GUO CHUNFU
TAO ZE
SHI YUTUO
ZHANG HOUDAO
MA JUN
LI WEIQI
description The invention relates to a library matching method and system for optical scattering, a server and a readable storage medium, and the method comprises the steps: building a theoretical spectrum library for a to-be-measured target, setting a nominal value of a morphology parameter, carrying out the interpolation of the theoretical spectrum library of the morphology parameter, obtaining an interpolation theoretical spectrum corresponding to the nominal value of the morphology parameter, and carrying out the calculation of the interpolation theoretical spectrum. obtaining a measurement spectrum through measurement, calculating a deviation value between the measurement spectrum and a theoretical spectrum, and when the deviation value does not meet a threshold value condition, updating the nominal value of the morphology parameter until the deviation value meets the threshold value condition, so that the extraction speed is increased under the condition that the extraction accuracy is not influenced, and the techn
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subjects MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
title Library matching method and system for optical scattering, server and storage medium
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