TRANSFER ROBOT AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME

TRANSFER ROBOT AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME

The present invention relates to a transfer robot for transferring a substrate through a transfer module and a substrate processing apparatus having the same. The invention discloses a substrate processing system, including: a transfer module provided with a transfer robot configured to transfer sub...

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Hauptverfasser: NA HUN-HEE, KO DONG-SUN, JEON KYUNG-HEE
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator NA HUN-HEE
KO DONG-SUN
JEON KYUNG-HEE
description The present invention relates to a transfer robot for transferring a substrate through a transfer module and a substrate processing apparatus having the same. The invention discloses a substrate processing system, including: a transfer module provided with a transfer robot configured to transfer substrates; one or more dual process modules each of which is installed at one side of the transfer module so that two substrates are accessible at the same time and on which a pair of substrate support units configured to respectively seat the two substrates thereon are disposed horizontally; and one or more single process modules each of which is installed at one side of the transfer module so that one substrate is accessible and on which one or more substrate support units configured to seat the substrates thereon are provided. The transfer robot includes a first substrate seating unit and a second substrate seating unit, each of which has a seating surface, on which the substrate is seated, and which are disposed
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title TRANSFER ROBOT AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME
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