DELIVERY OF LIGHT INTO A VACUUM CHAMBER USING AN OPTICAL FIBER

A system for laser enhanced voltage contrast using an optical fiber is provided. The system includes a vacuum chamber with a stage that secures a wafer. A laser light source outside the vacuum chamber directs light to an optical fiber. The optical fiber transmits all wavelengths of light from the laser light source into the vacuum chamber through a wall of the vacuum chamber. 本发明提供使用光纤达成激光增强电压对比度的系统。所述系统包含具有对晶片进行紧固的载台的真空腔室。所述真空腔室外部的激光光源将光引导到光纤。所述光纤将来自所述激光光源的所有波长的光穿过所述真空腔室的壁传输到所述真空腔室中。