Design method for anti-micro-vibration base of precise exposure and coating equipment

The invention provides a design method for an anti-micro-vibration base of precise exposure and coating equipment. The design method is characterized by comprising the following steps: forming a waffle plate structure (30) for supporting a base platform (10), and forming a through hole (31) in the w...

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Bibliographische Detailangaben
Hauptverfasser:	ZHANG CHENGYU, REN YIDI, WANG FEI, LI XIAOYUN, LI FENGLIN, HUANG WEI, HU MINGYI, WANG JINPEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	EMBANKMENTS EXCAVATIONS FIXED CONSTRUCTIONS FOUNDATIONS HYDRAULIC ENGINEERING SOIL SHIFTING UNDERGROUND OR UNDERWATER STRUCTURES
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