Design method for anti-micro-vibration base of precise exposure and coating equipment

The invention provides a design method for an anti-micro-vibration base of precise exposure and coating equipment. The design method is characterized by comprising the following steps: forming a waffle plate structure (30) for supporting a base platform (10), and forming a through hole (31) in the waffle plate structure (30); forming the base platform (10), specifically, forming a bottomless steel box by using a profile steel frame (11) and a steel plate, overturning the bottomless steel box, and pouring concrete; after curing a concrete surface layer to reach certain strength, using the steel plate for sealing to serve as a bottom surface; and performing epoxy treatment on the steel plate on the upper surface of the base platform (10) to form an epoxy surface layer (20). A foundation can be prefabricated in a processing factory and transported to a site for assembly, the characteristics of simple and convenient construction process and high foundation rigidity are achieved, the environmental vibration influe