MICROFLUIDIC EJECTION CHIP, EJECTION HEAD, DISPENSING DEVICE AND METHOD FOR FORMING THE SAME

The invention relates to a microfluidic ejection chip, an ejection head, a dispensing device and a method for forming the same. The microfluidic ejection chip includes a silicon substrate having a fluid passageway. The fluid passageway is defined by a silicon sidewall of the silicon substrate that is covered by a permanent passivation layer to protect the silicon sidewall from exposure to an acidic fluid. The permanent passivation layer is retained on the silicon sidewall at a conclusion of etching of the silicon substrate to form the fluid passageway. 一种微流体喷射芯片、喷射头与分配装置、及产生方法。微流体喷射芯片包括具有流体通道的硅衬底。流体通道由硅衬底的硅侧壁界定，所述硅侧壁被永久钝化层覆盖，以保护硅侧壁免暴露于酸性流体。永久钝化层在对硅衬底的刻蚀结束时保留在硅侧壁上以形成流体通道。