Calibration method of multi-instrument combined measurement system

The invention relates to a calibration method of a multi-instrument combined measurement system. A multi-tooth indexing table is used as a standard device to calibrate a coordinate system rotation error of the multi-instrument combined measurement system; a linear guide rail with a laser interferome...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SONG ZENGCHAO, FU YUNXIA, REN YU, ZHANG FENG, LIU FANGFANG, HU XIAOLEI
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention relates to a calibration method of a multi-instrument combined measurement system. A multi-tooth indexing table is used as a standard device to calibrate a coordinate system rotation error of the multi-instrument combined measurement system; a linear guide rail with a laser interferometer is used as a standard device to calibrate the coordinate system translation error of the multi-instrument combined measurement system; and a length scale is used as a standard device to calibrate the space distance length error of a common measuring point and a non-common measuring point of the multi-instrument combined measuring system. According to the method, the problem that an existing calibration method of a single measuring instrument cannot be directly applied to calibration of the multi-instrument combined measurement system is solved, the quantity value unification, accuracy and reliability of the multi-instrument combined measurement system are guaranteed, and research, development, upgrading and fie