Calibration method of multi-instrument combined measurement system
The invention relates to a calibration method of a multi-instrument combined measurement system. A multi-tooth indexing table is used as a standard device to calibrate a coordinate system rotation error of the multi-instrument combined measurement system; a linear guide rail with a laser interferome...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a calibration method of a multi-instrument combined measurement system. A multi-tooth indexing table is used as a standard device to calibrate a coordinate system rotation error of the multi-instrument combined measurement system; a linear guide rail with a laser interferometer is used as a standard device to calibrate the coordinate system translation error of the multi-instrument combined measurement system; and a length scale is used as a standard device to calibrate the space distance length error of a common measuring point and a non-common measuring point of the multi-instrument combined measuring system. According to the method, the problem that an existing calibration method of a single measuring instrument cannot be directly applied to calibration of the multi-instrument combined measurement system is solved, the quantity value unification, accuracy and reliability of the multi-instrument combined measurement system are guaranteed, and research, development, upgrading and fie |
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