PIEZOELECTRIC MATERIAL AND PIEZOELECTRIC DEVICE

PIEZOELECTRIC MATERIAL AND PIEZOELECTRIC DEVICE

Piezoelectric nitride compound materials with improved properties is provided. The piezoelectric material comprises aluminium, nitrogen and ternary and quaternary dopants that can be selected from calcium, ruthenium, boron and/or yttrium. 提供了具有改进特性的压电氮化物化合物材料。压电材料包括铝、氮以及可以选自钙、钌、硼和/或钇的三元和四元掺杂剂。...

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Hauptverfasser: KOUTSAROFF IVOYL, HONTGAS CHRISTOPHER HAYDEN
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creator KOUTSAROFF IVOYL
HONTGAS CHRISTOPHER HAYDEN
description Piezoelectric nitride compound materials with improved properties is provided. The piezoelectric material comprises aluminium, nitrogen and ternary and quaternary dopants that can be selected from calcium, ruthenium, boron and/or yttrium. 提供了具有改进特性的压电氮化物化合物材料。压电材料包括铝、氮以及可以选自钙、钌、硼和/或钇的三元和四元掺杂剂。
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title PIEZOELECTRIC MATERIAL AND PIEZOELECTRIC DEVICE
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